中文
Earlier issues
Announcement
More
Progress in Chemistry 2009, Vol. 21 Issue (12): 2734-2743 Previous Articles   Next Articles

• Review •

WO3-Based Gas Sensors

Xu Yuxing1,2**;  Tan Qiangqiang1;  Tang Zilong2;  Zhang Zhongtai2;  Yuan Zhangfu1   

  1. (1. Institute of Process Engineering, Chinese Academy of Sciences, Beijing 100190, China; 2.Department of Materials Science and Engineering, Tsinghua University, Beijing 100084, China)
  • Received: Revised: Online: Published:
  • Contact: Xu Yuxing E-mail:yxxu@home.ipe.ac.cn
PDF ( 2208 ) Cited
Export

EndNote

Ris

BibTeX

Gas sensors have been extensively developed in biology, chemistry, aeronautics, military affairs. WO3-based gas sensors have been characterized as one of the most promising neotype oxide gas sensors for the detection of H2S, NOx, O3, NH3 and so on. An overview clarified by different sensing gases of the progress in WO3-based gas sensors has been presented systematically. EEffects of preparation methods and noble metal dopants on gas sensing properties mentioned above have been discussed in detail. Gas sensing mechanism of WO3 gas sensor has been discussed in this paper. Finally, the problems existed during the research process of WO3-based gas sensors have been pointed out.

Contents
1 Introduction
2 Research progress
2.1 H2S gas sensors based on WO3
2.2 NOx gas sensors based on WO3
2.3 NH3 gas sensors based on WO3
2.4 H2 and CO gas sensors based on WO3
2.5 O3 gas sensors based on WO3
2.6 Other gas sensors based on WO3
2.7 Study of WO3 gas sensors on various gases simultaneously
3 Gas sensing mechanism of WO3 gas sensor
4 Conclusion

Key words: WO3, gas sensors, gas sensing properties, gas sensing mechanism

CLC Number: 

[ 1 ] 　Shaver P J . Appl . Phys. Lett . , 1967 , 11 (8) : 255 —230
[ 2 ] 　Barret E P S , Georgiades G C , Sermon P A. Sens. Actuators B ,1990 , 1 : 116 —122
[ 3 ] 　Dwyer D J . Sens. Actuators B , 1991 , 5 : 155 —161
[ 4 ] 　Smith D J , Vatelino J F , Flaconer R S , et al . Sens. Actuators B ,1993 , 13P14 : 264 —270
[ 5 ] 　Ruokamo I , K?rkk?inen T, Huusko J , et al . Lantto , 1994 , 19 (1/2/3) : 486 —488
[ 6 ] 　Fruhberger B , Grunze M, Dwyer D J . Sens. Actuators B , 1996 ,31 : 167 —174
[ 7 ] 　Lin H M, Hsu C M, Yang H Y, et al . Sens. Actuators B , 1994 ,22 : 63 —68
[ 8 ] 　Royster T L , Chatterjee D , Paz-Pujalt G R , et al . Sens. Actuators B , 1998 , 53 : 155 —162
[ 9 ] 　Solis J L , Hoel A , Kish L B , et al . J . Am. Ceram. Soc. , 2001 ,84 : 1504 —1508
[10 ] 　Antonik M D , Schneider J E , Wittman E L , et al . Thin Solid Films ,1995 , 256 : 247 —252
[11 ] 　Solis J L , Saukko S , Granqvist C G, et al . Thin Solid Films , 2001 ,391 : 255 —260
[12 ] 　Ionescu R , Hoel A , Granqvist C G, et al . Sens. Actuators B ,2005 , 104 : 132 —139
[13 ] 　Stankova M, Vilanova X, Calderer J , et al . Sens. Actuators B ,2004 , 102 : 219 —225
[14 ] 　Stankova M, Vilanova X, Calderer J , et al . Sens. Actuators B ,2006 , 113 : 241 —248
[15 ] 　Solis J L , Saukko S , Kish L B , et al . Sens. Actuators B , 2001 , 1/2 (15) : 316 —321
[16 ] 　Tao W H , Tsai C H. Sens. Actuators B , 2002 , 81 (2P3) 237 —247
[17 ] 　Ionescu R , Hoel A , Granqvist C G, et al . Sens. Actuators B ,2005 , 104 : 124 —131
[18 ] 　Jimenez J , Arbiol J , Dezanneau G, et al . Sens. Actuators B , 2003 ,93 : 475 —485
[19 ] 　Reyes L F , Hoel A , Saukko S , et al . Sens. Actuators B , 2006 ,117 : 128 —134
[20 ] 　Geng L N , Huang X L , Zhao Y Q , et al . Solid-State Electronics ,2006 , 50 : 723 —726
[21 ] 　Ponzoni A , Comini E , Sberveglieri G, et al . Appl . Phys. Lett . ,2006 , 88 : art . no. 203101
[22 ] 　Rout C S , Hegde M, Rao C N R. Sens. Actuators B , 2008 , 128 :488 —493
[23 ] 　Akiyama M, Tamaki J , Miura N , et al . Chem. Lett . , 1991 , 9 : 1611 —1616
[24 ] 　Satake K, Kobayashi A , Inoue T, et al . Proceedings of the 3rd International Meetting , Chem Sensors , Cleveland , USA , 1991. 334 —337
[25 ] 　Sadaoka Y, Sakai Y, Yamazoe N , et al . Denki Kagaku , 1982 , 50 : 457 —462
[26 ] 　Jones T A , Bott B. Sens. Actuators B , 1986 , 9 : 27 —37
[27 ] 　Nieuwenhuizen M S , Nederlof A J . Sens. Actuators B , 1989 , 19 : 385 —392
[28 ] 　Miura N , Sheng Y, Shimizu Y, et al . Sens. Actuators B , 1993 , 13/14 : 387 —390
[29 ] 　Nomura T, Murayama H , Amamoto T, et al . Pmt . Symposium Chem. Sensors Ⅱ, Hawai , USA , 1993. 530 —537
[30 ] 　Smith D J , Vetelino J F , Falconer R S , et al . Sens. Actuators B , 1993 , 13 : 264 —268
[31 ] 　Tamaki J , Fujii T, Fujimori K, et al . Proceedings of the Fifth International Meetting on Chemical Sensors , 1994. 498 —501
[32 ] 　Akiyama M, Zhang Z, Tamaki J , et al . Sens. Actuators B , 1993 , 13/14 : 619 —620
[33 ] 　Cantalini C , Passacantando M. Sens. Actuators B , 1996 , 31 : 81 — 87
[34 ] 　Inoue T, Ohtsuka K, Yoshiya Y, et al . Sens. Actuators B , 1995 , 25 (1/2/3) : 388 —391
[35 ] 　Sberveglieri G, Depero L , Groppelli S , et al . Sens. Actuators B , 1995 , 26 (1/2/3) : 89 —92
[36 ] 　Nelli P , Depero L E , Ferroni M, et al . Sens. Actuators B , 1996 , 31 : 89 —92
[37 ] 　Penza M, Vasanelli L. Sens. Actuators B , 1997 , 41 : 31 —36
[38 ] 　Penza M, Tagliente M A , Mirenghi L , et al . Sens. Actuators B , 1998 , 50 : 9 —18
[39 ] 　Penza M, Martucci C , Cassano G. Sens. Actuators B , 1998 , 1 (50) : 52 —59
[40 ] 　Kim T l of Korean Ceramic Society , 1997 , 34 : 387 —393
[41 ] 　Tomchenko A A , Khatko V V , Emelianov I L. Sens. Actuators B , 1998 , 46 : 8 —14
[42 ] 　Lee D S , Han S D. Sens. Actuators B , 1999 , 60 : 57 —63
[43 ] 　Chung Y K, Kim M H , Um W S , et al . Sens. Actuators B , 1999 , 60 : 49 —56
[44 ] 　Yang J I , Lim H , Han S D. Sens. Actuators B , 1999 , 60 : 71 —77
[45 ] 　Tomchenko A A , Emelianov I L , Khatko V V. Sens. Actuators B , 1999 , 57 : 166 —170
[46 ] 　Kim T S , Kim Y B , Yoo K S , et al . Sens. Actuators B , 2000 , 62 : 102 —108
[47 ] 　Lee D S , LimJ W, Lee S M, et al . Sens. Actuators B , 2000 , 64 : 31 —36
[48 ] 　Lee D S , Nam K H , Lee D D. Thin Solid Films , 2000 , 375 : 142 —146
[49 ] 　Lee D S , Han S D , Lee S M, et al . Sens. Actuators B , 2000 , 65 : 331 —335
[50 ] 　Zhao Y, Feng Z C , Liang Y. Sens. Actuators B , 2000 , 66 : 171 — 173
[51 ] 　Tong M, Dai G R , Wu Y D , et al . Journal of Materials Science , 2001 , 36 : 2535 —2538
[52 ] 　Starke T K H , Coles G S V , Ferkel H. Sens. Actuators B , 2002 , 85 : 239 —245
[53 ] 　Choi Y, Sakai G, Shimanoe K, et al . Sens. Actuators B , 2003 , 95 : 258 —265
[54 ] 　Wang S H , Choua T C , Liu C C. Sens. Actuators B , 2003 , 94 : 343 —351
[55 ] 　He X L , Li J P , Gao X G, et al . Sens. Actuators B , 2003 , 93 : 463 —467
[56 ] 　Teoh L G, Hona Y M, Shieh J , et al . Sens. Actuators B , 2003 , 96 : 219 —225
[57 ] 　Choi Y G, Sakai G, Shimanoe K, et al . Sens. Actuators B , 2004 , 101 : 107 —111
[58 ] 　Guidi V , Blo M, Butturi M A , et al . Sens. Actuators B , 2004 , 100 : 277 —282
[59 ] 　Kawasaki H , Ueda T, Suda Y, et al . Sens. Actuators B , 2004 , 100 : 266 —269
[60 ] 　Blo M, Carotta M C , Galliera S , et al . Sens. Actuators B , 2004 , 103 : 213 —218
[61 ] 　Tamaki J , Miyaji A , Makinodan J , et al . Sens. Actuators B , 2005 , 108 : 202 —206
[62 ] 　Rout C S , Ganesh K, Govindaraj A , et al . Applied Physics A , 2006 , 85 : 241 —246
[63 ] 　Polleux J , Gurlo A , Barsan N , et al . Angewandte Chemie — International Edition , 2006 , 45 : 261 —265
[64 ] 　Jin C J , Yamazakia T, Shiraia Y, et al . Thin Solid Films , 2005 , 474 : 255 —260
[65 ] 　Xie G Z, Yu J S , Chen X, et al . Sens. Actuators B , 2007 , 123 : 909 —914
[66 ] 　Liu Z F , Yamazaki T, Shen Y B , et al . Sens. Actuators B , 2007 , 128 : 173 —178
[67 ] 　Rossinyol E , Prim A , Pellicer E , et al . Advanced Functional Materials , 2007 , 17 : 1801 —1806
[68 ] 　Piperno S , Passacantando M, Santucci S , et al . Journal of Applied Physics , 2007 , 101 : art . no. 124504
[69 ] 　Maekawa T, Tamaki J , Miura N , et al . Chem. Lett . , 1992 : 639 — 642
[70 ] 　Wang X, Miura N , Yamazoe N. Sens. Actuators B , 2000 , 66 : 74 —76
[71 ] 　Xu C N , Miura N , Ishida Y, et al . Sens. Actuators B , 2000 , 65 : 163 —165
[72 ] 　Llobet E , Molas G, Molinàs P , et al . Journal of the Electrochemical Society , 2000 , 147 (2) : 776 —779
[73 ] 　Marquis B T, Vetelino J F. Sens. Actuators B , 2001 , 77 : 100 —110
[74 ] 　JimUnez I , Centeno M A , Scotti R , et al . Journal of the Electrochemical Society , 2003 , 150 (4) : H72 —H80
[75 ] 　JimUnez I , Centeno M A , Scotti R , et al . Journal of Materials Chemistry , 2004 , 14 : 2412 —2420
[76 ] 　Stankova M, Vilanova X, Llobet E , et al . Sens. Actuators B , 2005 , 105 : 271 —277
[77 ] 　Wang G, Ji Y, Huang X R , et al . Journal of Physics Chemistry B , 2006 , 110 : 23777 —23782
[78 ] 　Morazzoni F , Scotti R , Origoni L , et al . Catalysis Today , 2007 , 126 : 169 —176
[79 ] 　Srivastava V , Jain K. Sens. Actuators B , 2008 , 133 : 46 —52
[80 ] 　Balà zsi C , Wang L , Zayimc E O , et al . J . Eur. Ceram. Soc. , 2008 , 28 : 913 —917
[81 ] 　Triantafyllopoulou R , Illa X, Casals O , et al . Microelectronic Engineering , 2008 , 85 : 1116 —1119
[82 ] 　Svensson J S E M, Granqvist C G. Appl . Phys. Lett . , 1984 , 45 (8) : 828 —830
[83 ] 　Goldner R B , Norton P , Wong K, et al . Appl . Phys. Lett . , 1985 , 47 (5) : 536 —538
[84 ] 　Ito K, Ohgami T. Appl . Phys. Lett . , 1992 , 60 (8) : 938 —940
[85 ] 　Lee KH , Fang Y K, Lee WJ , et al . Sens. Actuators B , 2000 , 69 : 96 —99
[86 ] 　Davazoglou D , Dritas T. Sens. Actuators B , 2001 , 77 : 359 —362
[87 ] 　D’Amico A , Palma A , Verona E. Proceedings of the IEEE Ultrasonics Symposium , 1982 , 308 —311
[88 ] 　D’Amico A , Palma A , Verona E. Sens. Actuators B , 1982 , 3 : 31 —39
[89 ] 　Jakubik W P , Urbànczyk M W, Kochowski S , et al . Sens. Actuators B , 2002 , 82 : 265 —271
[90 ] 　Thiele J A , Cunha M P. Proceedings of the IEEE Ultrasonics Symposium , 2003 , 1750 —1753
[91 ] 　Ippolito S J , Kandasamy S , Kalantar-Zadeh K, et al . Smart Materials and Structures , 2006 , 15 : S131 —S136
[92 ] 　Ippolitoa S J , Kandasamya S , Kalantar-Zadeha K, et al . Sens. Actuators B , 2005 , 108 : 553 —557
[93 ] 　Ippolitoa S J , Kandasamya S , Kalantar-Zadeha K, et al . Sensor Letters , 2003 , 1 : 33 —36
[94 ] 　Ippolitoa S J , Kandasamya S , Kalantar-Zadeha K, et al . Proceedings SPIE , 2004 , 5274 : 416 —426
[95 ] 　Ippolitoa S J , Kandasamya S , Kalantar-Zadeha K, et al . Sens. Actuators B , 2005 , 108 : 154 —158
[96 ] 　Sedek A Z, Wlodarski W, Shin K, et al . Synthetic Metals , 2008 , 158 (1/2) : 29 —32
[97 ] 　Okazaki S , Nakagawa H , Asakura S , et al . Sens. Actuators B , 2003 , 93 : 142 —147
[98 ] 　Yamazoe N , Kurokawa Y, Seiyama T. Sens. Actuators B , 1983 , 4 : 283 —289
[99 ] 　Vlachos D S , Papadopoulos C A , Avaritsiotis J N. Sens. Actuators B , 1997 , 44 (1/2/3) : 458 —461
[100 ] Ando M, Chabicovsky R , Haruta M. Sens. Actuators B , 2001 , 76 : 13 —17
[101 ] Azad A M, Hammoud M. Sens. Actuators B , 2006 , 119 : 384 —391
[102 ] Kandasamy S , Trinchi A , Wlodarski W, et al . Sens. Actuators B , 2005 , 111/112 : 111 —116
[103 ] Nakagomi S , Okuda K, Kokubun Y. Sens. Actuators B , 2003 , 96 : 364 —371
[104 ] Xu Y X, Tang Z L , Zhang Z T, et al . Sens. Letters , 2008 , 6 (6) : 938 —941
[105 ] Lee D S , Han S D , Huh J S , et al . Sens. Actuators B , 1999 , 60 : 57 —63
[106 ] Cantalini C , Wlodarski W, Li Y, et al . Sensors Actuators B , 2000 , 64 : 182 —188
[107 ] Aliwell S R , Halsall J F , Pratt K F E , et al . Measurement Science and Technology , 2001 , 12 : 684 —690
[108 ] Aguir K, Lemire C , Lollman D B B. Sensors Actuators B , 2002 , 84 : 1 —5
[109 ] Fryˇcek R , VladimVr M, Martin V , et al . Sens. Actuators B , 2004 , 98 : 233 —238
[110 ] BendahanM, Boulmani R , Seguin J L , et al . Sens. Actuators B , 2004 , 100 : 320 —324
[111 ] Guérin J . Sens. Actuators B , 2005 , 104 : 289 —293
[112 ] Labidi A , Gillet E , Delamare R , et al . Sens. Actuators B , 2006 , 120 : 338 —345
[113 ] GuUrin J , Aguir K, Bendahan M. Sens. Actuators B , 2006 , 119 : 327 —334
[114 ] Boulmani R , Bendahan M, Lambert-Mauriat C , et al . Sens. Actuators B , 2007 , 125 : 622 —627
[115 ] Vallejos S , Khatko V , Aguir K, et al . Sens. Actuators B , 2007 ,126 : 573 —578
[116 ] Belkacem W, Labidi A , GuUrin J , et al . Sens. Actuators B , 2008 ,  132 : 196 —201
[117 ] Parvatikar N , Jain S , Khasima S , et al . Sens. Actuators B , 2006 , 114 : 599 —603
[118 ] Sriyudthsak M, Supothina S. Sens. Actuators B , 2006 , 113 : 265 — 271
[119 ] Shimizu Y, Matsunaga N , Hyodo T, et al . Sens. Actuators B , 2001 , 77 : 35 —40
[120 ] Labidi A , Lambert-Mauriat C , Jacolin C , et al . Sens. Actuators B , 2006 , 119 : 374 —379
[121 ] Khadayate R S , Waghulder R B , Wankhedem M G, et al . Bull . Mater. Sci . , 2007 , 30 (2) : 129 —133
[122 ] Ashraf S , Binions R , Blackman C S , et al . Polyhedron , 2007 , 26 : 1493 —1498
[123 ] Kanda K, Maekawa T. Sens. Actuators B , 2005 , 108 : 97 —101
[124 ] Luo S , Fub G, Chen H , et al . Mater. Chem. Phys. , 2008 , 109 : 541 —546
[125 ] Luo S , Fu G, Chen H , et al . Solid-State Electronics , 2007 , 51 : 913 —919
[126 ] Khadayate R S , Sali J V , Patil P P. Talanta , 2007 , 72 : 1077 — 1081
[127 ] Kanan S M, Waghe A , Jensen B L , et al . Talanta , 2007 , 72 : 401 —407
[128 ] Chaudhari G N , Bende A M, Bodade A B , et al . Talanta , 2006 , 69 : 187 —191
[129 ] Tomchenko A A , Harmer G P , Marquis B T, et al . Sens. Actuators B , 2003 , 93 : 126 —134
[130 ] Li X L , Lou T J , Sun X M, et al . Inorganic Chemistry , 2004 , 43 (17) : 5442 —5449
[131 ] Hoel A , Reyes L F , Heszler P , et al . Current Applied Physics , 2004 , 4 : 547 —553
[132 ] Hubálek J , Malysz K, Práˇsek J , et al . Sens. Actuators B , 2004 , 101 : 277 —283
[133 ] Khatko V , Llobet E , Vilanova X, et al . Sens. Actuators B , 2005 , 111P112 : 45 —51
[134 ] Ponzoni A , Comini E , Ferroni M, et al . Thin Solid Films , 2005 , 490 : 81 —85
[135 ] Khatko V , Calderer J , Llobet E , et al . Sens. Actuators B , 2005 , 109 : 128 —134
[136 ] Reyes L F , Hoel A , Saukko S , et al . Sens. Actuators B , 2006 , 117 : 128 —134
[137 ] Stankova M, Vilanova X, Llobet E , et al . Thin Solid Films , 2006 , 500 : 302 —308
[138 ] Stankova M, Vilanova X, Calderer J , et al . Sens. Actuators B , 2006 , 113 : 241 —248
[139 ] Bittencourt C , Felten A , Espinosa E H , et al . Sens. Actuators B , 2006 , 115 : 33 —41
[140 ] Khatko V , Vallejos S , Calderer J , et al . Sens. Actuators B , 2007 , 126 : 400 —405
[141 ] Comini E , Pandolfi L , Kaciulis S , et al . Sens. Actuators B , 2007 , 127 : 22 —28
[142 ] Vallejos S , Khatko V , Calderer J , et al . Sens. Actuators B , 2008 , 132 : 209 —215
[143 ] Ruiz A , Sakai G, Cornet A , et al . Sensors and Actuators B , 2003 , 93 : 509 —518
[1] Jinglong Zhao, Wenfeng Shen, Dawu Lv, Jiaqi Yin, Tongxiang Liang, Weijie Song. Gas-Sensing Technology for Human Breath Detection [J]. Progress in Chemistry, 2023, 35(2): 302-317.
[2] Jixiu Zhu, Qiaofen Chen, Titong Ni, Aimin Chen, Jianmin Wu. Application for Exhaled Gas Sensor Based on Novel Mxenes Materials* [J]. Progress in Chemistry, 2021, 33(2): 232-242.
[3] Jixiu Zhu, Qiaofen Chen, Titong Ni, Aimin Chen, Jianmin Wu. Application for Exhaled Gas Sensor Based on Novel Mxenes Materials* [J]. Progress in Chemistry, 2021, 33(2): 232-242.
[4] Ding Jinyue Zhong Liang Zhang Shuyuan Ma Zhi. Nano WO3 Gasochromic Materials Prepared by Sol-Gel Process [J]. Progress in Chemistry, 2009, 21(6): 1171-1178.
[5] Wen Xiaoyan. Modified Carbon Nanotube Gas Sensors [J]. Progress in Chemistry, 2008, 20(0203): 260-264.
Viewed
Full text


Abstract

WO3-Based Gas Sensors