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Progress in Chemistry 2008, Vol. 20 Issue (12): 2061-2067 Previous Articles   Next Articles

• Review •

Fabrication Technologies of Nanofluidic Chips and Their Applications

He Qiaohong; Chen Shuang

  

  1. （Institute of Microanalytical Systems, Department of Chemistry, Zhejiang University, Hangzhou 310058, China）
  • Received: Revised: Online: Published:
  • Contact: He Qiaohong
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The studies on the fundamental nanofluidics and various applications of nanofluidic chips in chemical and biochemical analysis have achieved fast progress in recent years. Both fundamental and applied researches on nanofluidics need nanofluidic chips that can be fabricated by means of micro- and nanofabrication technologies. This review introduces the developed techniques for fabricating nanofluidic chip, including bulk-film maching method, sacrificial layer technology, mold-machining method, chemical-mechanical polishing method, thermomechanical drawing method, and other fabrication thechnologies. The applications of nanofluidic chips in sample pretreatment and biochemical analysis are reviewed.
Key words: nanofluidic chips, fabrication, applications

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[1 ] Mukhopadhyay R. Anal . Chem. , 2006 , 78 : 7379 —7382
[2 ] Eijkel J C T, van den Berg A. Lab Chip , 2005 , 5 : 1202 —1209
[3 ] Tas N R , Mela P , Kramer T, et al . Nano Lett . , 2003 , 3 (11) :1537 —1540
[4 ] Eijkel J C T. Lab Chip , 2007 , 7 : 299 —301
[5 ] 曹炳阳(Cao B Y) , 陈民(Chen M) , 过增元(Guo Z Y) . 物理学报(Acta Physica Sinica) , 2006 , 55 (10) : 5305 —5310
[6 ] Wang Y C , Stevens A L , Han J . Anal . Chem. , 2005 , 77 :4293 —4299
[7 ] Pu Q S , Yun J S , Temkin H , et al . Nano Lett . , 2004 , 4 (6) :1099 —1103
[8 ] Schoch R B , Bertsch A , Renaud P. Nano Lett . , 2006 , 6 (3) :543 —547
[9 ] Liao K P , Yao N K, Kuo T S. Conf . Proc. IEEE. Eng. Med.Biol . Soc. , 2006 , 1 : 2832 —2835
[10] Chapman H N , Ray-Chaudhuri A K, Tichenor D A , et al . J .Vac. Sci . Technol . B , 2001 , 19 (6) : 2389 —2395
[11] Naulleau P , Goldberg K A , Anderson Erik H , et al . J . Vac.Sci . Technol . B , 2002 , 20 (6) : 2829 —2833
[12] Chao W, Anderson E H , Denbeaux G, et al . J . Vac. Sci .Technol . B , 2003 , 21 (6) : 3108 —3111
[13] Tiron R , Mollard L , Louveau O , et al . J . Vac. Sci . Technol .B , 2007 , 25 (4) : 1147 —1151
[14] Sandison M E , Cooper J M. Lab Chip , 2006 , 6 : 1021 —1025
[15] Danelon C , Santschi C , Bugger J , et al . Langmuir , 2006 , 22 :10711 —10715
[16] Tamaki E , Hibara A , Kim H B , et al . Anal . Sci . , 2006 , 22 :529 —532
[17] Wang K, Yue S , Wang L , et al . IEE Proc. Nanobiotechnol . ,2006 , 153 (1) : 11 —15
[18] Veerman J A , Otter A M, Kuipers L. Appl . Phys. Lett . , 1998 ,24 : 3115 —3117
[19] Yanagi H , Kwawi Y. J . Appl . Phys. , 2004 , 43 : L1575 —L1577
[20] Shao P E , van Kan A , Wang L P , et al . Appl . Phys. Lett . ,2006 , 88 : art . no. 093516
[21] Van Kan J A , Bettiol A A , Watt F. Appl . Phys. Lett . , 2003 ,83 (8) : 1629 —1631
[22] Wang L P , Shao P G, van Kan J A , et al . Nucl . Instr. Meth.Phys. Res. B , 2007 , 260 : 450 —454
[23] Mahabadi K A , Rodriguez I , Haur S C. J . Micromech.Microeng. , 2006 , 16 : 1170 —1180
[24] OpBrien M J , Bisong P , Ista L K, et al . J . Vac. Sci . Technol .B , 2003 , 21 (6) : 2941 —2945
[25] Chen X, Ji R , Steinhart M, et al . Chem. Mater. , 2007 , 19 :3 —5
[26] Hug T S , de Rooij N F , Staufer U. Microfluid. Nanofluid. ,2006 , 2 : 117 —124
[27] Mao P , Han J . Lab Chip , 2005 , 5 : 837 —844
[28] Haneveld J , Jansen H , Berenschot E , et al . Micromech.Microeng. , 2003 , 13 : S62 —S66
[29] Yang P , Zhang X, Xie J Y, et al . Biomacromolecules , 2006 , 7 :2770 —2775
[30] 陈双(Chen S) , 宿媛(Su Y) , 何巧红(He Q H) 等. 第四届全国微全分析系统学术会议, 大连. The 4th National Conference on Miniaturized Total Analysis Systems , DaLian ,2007. 37 —38
[31] Datta A , Gangopadhyay S , Temkin H , et al . Talanta , 2006 , 68 :659 —665
[32] Lee C , Yang E H , Myung N V , et al . Nano Lett . , 2003 , 3(10) : 1339 —1340
[33] Kutchoukov V G, Laugere F , van der Vlist W, et al . Sens.Actuators A , 2004 , 114 : 521 —527
[34] Peng C Y, Nam W J , Fonash S J , et al . J . Am. Chem. Soc. ,2003 , 125 : 9298 —9299
[35] Li N , Yu S , Harrell C C , et al . Anal . Chem. , 2004 , 76 :2025 —2030
[36] 张伟明(Zhang W M) , 王宇钢(Wang Y G) , 薛建明(Xue J M) . 原子核物理评论(Nuclear Physics Review) , 2006 , 23 (1) :35 —39
[37] Kutchoukov V G, Pakula L , Parikesit G O F , et al . Sens.Actuators A , 2005 , 123P124 : 602 —607
[38] Lei K F , Ahsan S , Budraa N , et al . Sens. Actuators A , 2004 ,114 : 340 —346
[39] Nakanishi H , Nishimoto T, Nakamura R , et al . Sens. Actuators A , 2000 , 79 : 237 —244
[40] Gu J , Gupta R , Chou C F , et al . Lab Chip , 2007 , 7 : 1198 —1201
[41] Eijkel J C T, Bomer J , Tas N R , et al . Lab Chip , 2004 , 4 :161 —163
[42] Turner S W, Perez A M, Lopez A , et al . J . Vac. Sci . Technol .B , 1998 , 16 (6) : 3835 —3840
[43] Tas N R , Berenschot J W, Mela P , et al . Nano Lett . , 2002 , 2(9) : 1031 —1032
[44] Han A P , de Rooij N F , Staufer U. Nanotechnology , 2006 , 17 :2498 —2503
[45] Li WL , Tegenfeldt J O , Chen L , et al . Nanotechnology , 2003 ,14 : 578 —583
[46] Reed H A , White C E , Rao V , et al . J . Micromech. Microeng. ,2001 , 11 : 733 —737
[47] Harnett C K, Coates G W, Craighead H G. J . Vac. Sci .Technol . B , 2001 , 19 (6) : 2842 —2845
[48] Barber J P , Conkey D B , Lee J R , et al . IEEE Photonics Technology Letters , 2005 , 17 (2) : 363 —365
[49] Zeng H J , Wan Z L , Feinerman A D. Nanotechnology , 2006 ,17 : 3183 —3188
[50] Abgrall P , Low L N , Nguyen N T. Lab Chip , 2007 , 7 : 520 —522
[51] Zhao W, Low H Y, Suresh P S. Langmuir , 2006 , 22 : 5520 —5524
[52] Jeong H E , Kim P , Kwak M K, et al . Small , 2007 , 3 (5) :778 —782
[53] Dumond J J , Low H Y, Rodriguez I. Nanotechnology , 2006 , 17 :1975 —1980
[54] Eliason M T, Charest J L , Simmons B A , et al . J . Vac. Sci .Technol . B , 2007 , 25 (4) : L31 —L34
[55] Guo L J , Cheng X, Chou C F. Nano Lett . , 2004 , 4 (1) : 69 —73
[56] Chou S Y, Krauss P R , Zhang W, et al . J . Vac. Sci . Technol .B , 1997 , 15 (6) : 2897 —2904
[57] Ahn H , Lee K J , Shim A , et al . Nano Lett . , 2005 , 5 (12) :2533 —2537
[58] Peroz C , Heitz C , Barthel E , et al . J . Vac. Sci . Technol . B ,2007 , 25 (4) : L27 —L30
[59] Kim P , Jeong H E , Khademhosseini A , et al . Lab Chip , 2006 ,6 : 1432 —1437
[60] Bao L R , Cheng X, Huang X D , et al . J . Vac. Sci . Technol .B , 2002 , 20 (6) : 2881 —2886
[61] Sun X Y, Zhuang L , Zhang W, et al . J . Vac. Sci . Technol . B ,1998 , 16 (6) : 3922 —3925
[62] Zaumseil J , Meitl M A , Hsu J W P , et al . Nano Lett . , 2003 , 3(9) : 1223 —1227
[63] Bao L R , Tan L , Huang X D , et al . J . Vac. Sci . Technol . B ,2003 , 21 (6) : 2749 —2754
[64] Huang X D , Bao L R , Cheng X, et al . J . Vac. Sci . Technol .B , 2002 , 20 (6) : 2872 —2876
[65] Wilbur J L , Kumar A , Kim E , et al . Adv. Mater. , 1994 , 6 (7/8) : 600 —604
[66] Flachsbart B R , Wong K, Iannacone J M, et al . Lab Chip ,2006 , 6 : 667 —674
[67] Sivanesan P , Okamoto K, English D , et al . Anal . Chem. , 2005 ,77 : 2252 —2258
[68] Huh D , Mills K L , Zhu X Y, et al . Nat . Mater. , 2007 , 6 :424 —428
[69] Ke K, Hasselbrink E F , Hunt A J . Anal . Chem. , 2005 , 77 :5083 —5088
[70] Lee J H , Chung S , Kim S J , et al . Anal . Chem. , 2007 , 79 :6868 —6873
[71] Létant S E , van Buuren T W, Terminello L J . Nano Lett . , 2004 ,4 (9) : 1705 —1707
[72] Ko H C , Baca A J , Rogers J A. Nano Lett . , 2006 , 6 (10) :2318 —2324
[73] Robinson J T, Evans P G, Liddle J A , et al . Nano Lett . , 2007 ,7 (7) : 2009 —2013
[74] Plecis A , Schoch R B , Renaud P. Nano Lett . , 2005 , 5 (6) :1147 —1155
[75] Jeon S , Malyarchuk V , White J O , et al . Nano Lett . , 2005 , 5(7) : 1351 —1356
[76] Tamaki E , Hibara A , Kim H B , et al . J . Chromatogr. A , 2006 ,1137 : 256 —262
[77] Garcia A L , Ista L K, Petsev D N , et al . Lab Chip , 2005 , 5 :1271 —1276
[78] Yun K, Yoon E. 7th International Conference on Miniaturized Chemical and Biochemical Analysis Systems , Squaw Valley ,California USA. 2003. 861 —862
[79] Han J , Craighead H G. Science , 2000 , 288 : 1026 —1029
[80] Dukkipati V R , Kim J H , Pang SW, et al . Nano Lett . , 2006 , 6(11) : 2499 —2504
[81] Reccius C H , Mannion J T, Cross J D , et al . Phys. Rev. Lett . ,2005 , 95 : art . no. 268101
[82] Odijk T. J . Chem. Phys. , 2006 , 125 : art . no. 204904
[83] Smeets R M M, Keyser U F , Krapf D , et al . Nano Lett . , 2006 ,6 (1) : 89 —95
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