The Development of Low Dielectric Constant Films

Wang Juan**,Zhang Changrui,Feng Jian

Progress in Chemistry ›› 2005, Vol. 17 ›› Issue (06) : 1001-1011.

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Progress in Chemistry ›› 2005, Vol. 17 ›› Issue (06) : 1001-1011.
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The Development of Low Dielectric Constant Films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2005, 17(06): 1001-1011

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