Preparation of Titanium Nitride by Chemical Vapor Deposition

Wang Shutao,Zhang Zude*

Progress in Chemistry ›› 2003, Vol. 15 ›› Issue (05) : 374.

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Progress in Chemistry ›› 2003, Vol. 15 ›› Issue (05) : 374.
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Preparation of Titanium Nitride by Chemical Vapor Deposition

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2003, 15(05): 374

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