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Progress in Chemistry 2002, Vol. 14 Issue (01): 61- Previous Articles   Next Articles

• Review •

Metal β-Diketonates Used as Precursors for Ferroelectric Oxide Thin Films

Xu Xiaohong;Hou Yun;Wang Min;Wang Hong;Zhou Aiqiu   

  1. College of Chemistry and Environment Science, Shandong University, Jinan 250100, China; College of Crystal Materials, Shandong University, Jinan 250100, China

  • Received: Revised: Online: Published:
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The preparation of volatile metalβ-diketonates used as precursors for deposition of the ferroelectric oxide thin films is reviewed. The structures and properties of them are presented and discussed. The use of them in metal organic vapor deposition of ferroelectric oxide thin films is also discussed.

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[1] Kong Xiangrong,Liu Junliang,Zeng Yanwei*. Advances in Research of Metallorganic Precursors for Ferroelectric Oxide Thin Films via MOCVD [J]. Progress in Chemistry, 2005, 17(05): 839-846.