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Progress in Chemistry 2023, Vol. 35 Issue (5): 709-720 DOI: 10.7536/PC221014 Previous Articles   Next Articles

• Review •

High-Sensitivity Flexible Pressure Sensor Based on Micro-Nano Structure

Yan Bao1,2(), Jiachen Xu1, Ruyue Guo1, Jianzhong Ma1   

  1. 1 College of Bioresources Chemical and Materials Engineering (College of Flexible Electronics), Shaanxi University of Science & Technology,Xi’an 710021, China
    2 National Demonstration Center for Experinenced Light Chemical Engineering Education, Shaanxi University of Science & Technology,Xi’an 710021, China
  • Received: Revised: Online: Published:
  • Contact: * e-mail: baoyan@sust.edu.cn
  • Supported by:
    National Natural Science Foundation of China(22078188); Xianyang City Qin Chuangyuan Science and Technology Innovation Special Project(2021ZDZX-GY-0007)
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In recent years, with the development and popularization of Internet and artificial intelligence, the flexible pressure sensor with light, convenience and excellent electronic performance, as the core device of wearable electronic equipment, has a increasingly broad market. Flexible pressure sensors have attracted extensive attention in electronic skin, motion detection, medical monitoring and man-machine interface because of its flexibility, folding and excellent sensing performance. The construction of micro-nano structures is the key to improve the sensitivity and sensing performance of pressure sensors. Based on this, the sensing mechanism (piezoresistive, capacitive, piezoelectric, triboelectric) and key performance parameters (sensitivity, pressure response range, detection limit, response/recovery time, stability of circulation and linearity, etc.) of the high-sensitivity pressure sensors were summarized. Then, research progress of flexible pressure sensors using substrates to construct surface micro-nano structures (micro-convex structure, bramble structure and fold structure) and using conductive materials to construct micro-nano structures (micro-sphere structure, urchin structure and cellular structure) were compared and concluded. Furthermore, the application status of high-sensitivity flexible pressure sensors based on micro-nano structure in pulse detection, electronic skin, motion detection and man-machine interface was concluded. Finally, from the perspective of future application, the challenges and development direction of high sensitivity flexible pressure sensor are summarized.

Contents

1 Introduction

2 Sensing mechanism and key performance parameters of high sensitivity flexible pressure sensor

2.1 Sensing mechanism

2.2 Key performance parameters

3 Construction of high sensitivity flexible pressure sensor based on micro-nano structure of substrate materials

3.1 Micro-convex structure

3.2 Bramble structure

3.3 Fold structure

4 Construction of high sensitivity flexible pressure sensor based on micro-nano structure of conductive materials

5 Application of high sensitivity flexible pressure sensor based on micro-nano structure

6 Summary and outlook

Key words: flexible pressure sensor, high sensitivity, micro-nano structure
Fig. 1 The sensing mechanism of different pressure sensors: (a) piezoresistive; (b) capacitive; (c) piezoelectric; (d) triboelectric
Table 1 Key performance parameters of flexible pressure sensor
Fig. 2 Resistance pressure sensor based on surface micro dome structure: (a) design drawing of micro dome structure; (b) contact diagram of micro dome structure under compression; (c) sensitivity curve[37]
Fig. 3 Sensitivity curve of pressure sensor based on micro dome CNTs/PDMS film: (a) preparation process of CNT/PDMS thin films for micro dome; (b) preparation process of CNT/PDMS thin films for micro dome; (c) comparison of sensing performance[38]
Fig. 4 Equivalent circuit and appearance photos of CNT/PDMS pressure sensor based on micro-cone structure[28]
Fig. 5 IOCA pressure sensor based on micro cone structure. (a) Schematic diagram of preparation process; (b) sensitivity fitting curve; (c) the sensing mechanism is shown in figure[42]
Fig. 6 Schematic diagram and sensing mechanism diagram of sponge pressure sensor[45]
Fig. 7 Capacitive pressure sensor based on pleated structure. (a~c) Sensing performance of wrinkle free, unilateral wrinkle and bilateral wrinkle pressure sensors under 5 kPa pressure; (d~f) response time of non fold, unilateral fold and bilateral fold pressure sensors; (g) schematic diagram of sensor preparation process[47]
Table 2 Performance of high sensitivity pressure sensor based on micro-nano structure
Micro-nano structure Sensitivity/ kPa-1 Detection range/kPa
(Detection limit/Pa)		 Response (recovery) time/ms Cycle stability/
times		 Application ref
Basal material None 5.24 0~16 40/380 > 3000 Bend the wrists, elbows, and knees 49
Micro dome structure 6.61 0~0.11(1) 100/100 > 3750 Finger click mouse, finger joint movement 50
0.19 0~100(500) 75/80 > 1000 Pulse, finger clicks, grip strength, and plantar pressure 37
15.1 0~59(0.2) 40/40 > 1000 Health testing, exercise monitoring 38
Micro vertebral structure 3.26 0~3 200/100 > 5000 Various textures, such as the texture of different fabrics, Braille, etc 40
2.51 0~10(2) 84/117 > 5000 Muscle activity and skipping rope 51
Micro cylindrical structure 419.6 0~0.1 31/15 > 1000 Swallowing and pulse 52
0.6 (0.06) 25/25 > 10000 Pulse, body movement, breathing, etc 41
Thorns structure 179.1 0~50(1.2) 400/400 > 10000 Heart rate and respiratory monitoring 46
1127 - 200/250 > 2000 Real-time posture signals were recorded at the lumbar and cervical spine 45
Fold structure 2.59 0~20(1) 10/20 > 3000 Clenching and joint movements 53
228.5 0~10(2.97) 66.8 > 10000 Pulse, finger movement 48
Conductive material Micro ball 924.37 0~220(0.83) - > 22000 Physiological signals such as arteries 59
Empty core ball 0.55 0~5 41 > 1200 Pulse and body movement 60
The sea
urchin shaped		 680 0~150(83) 10/22 > 3500 Pulse, pronunciation, palm and finger movements, walking 64
Honeycomb 161.6 0~10(9) - > 200 Artificial skin 67
Fig. 8 Schematic diagram of conductive hollow carbon ball structure[60]
Fig. 9 Based on Fe2O3/C@SnO2 schematic diagram of pressure sensing mechanism of flexible sponge[64]
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