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Progress in Chemistry 2022, Vol. 34 Issue (10): 2202-2221 DOI: 10.7536/PC220117 Previous Articles   Next Articles

• Review •

Performance Enhancing Mechanism,Implementation and Practical Advantages of Microstructured Flexible Pressure Sensors

Zhao Jing1,2, Wang Ziya3, Mo Lixin1,2(), Meng Xiangyou1,2, Li Luhai1,2, Peng Zhengchun3()   

  1. 1 College of Printing and Packaging Engineering, Beijing Institute of Graphic Communication,Beijing 102600, China
    2 Beijing Engineering Research Center of Printed Electronics, Beijing Institute of Graphic Communication,Beijing 102600, China
    3 Center for Stretchable Electronics and Nano Sensors, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education, College of Physics and Optoelectronic Engineering, Shenzhen University,Shenzhen 518060, China
  • Received: Revised: Online: Published:
  • Contact: Mo Lixin, Peng Zhengchun
  • Supported by:
    National Natural Science Foundation of China(61903317); Beijing Natural Science Foundation(KZ202110015019); research plan of BIGC(Ef202002); Joint Funding Program of Guangdong Department of Science and Technology and Hongkong Innovation and Technology(2021A0505110015); Shenzhen Science and Technology Program(KQTD20170810105439418); Shenzhen Science and Technology Program(JCYJ20200109114237902)
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The flexible pressure sensor with high flexibility, easy conformality, high sensitivity and fast response is a novel flexible electronic device. It is also the critical device for the development of tactile artificial intelligence, internet of things, wearable electronics and relative technologies. The strategies based on development of sensitive functional materials, device structure design and construction, and optimization of fabrication methods have been widely used to improve the comprehensive performance of flexible pressure sensors. Among them, utilizing the microstructure of functional layer of flexible pressure sensor to enhance its performance is generally considered to be one of the most effective ways. In this paper, the latest research progress of microstructured flexible pressure sensors in recent years is summarized. It mainly focuses on the performance enhancement mechanism of microstructured flexible pressure sensor, microstructure construction and fabrication methods, new sensitive functional materials, as well as its applications in human-machine interaction, medical and health and other relative fields. Finally, the future development of microstructured flexible pressure sensor is prospected.

Key words: flexible pressure sensor, flexible electronics, microstructure, sensing mechanism, performance enhancement, medical health, human-machine interaction
Fig. 1 Design of flexible pressure sensors with different microstructures: hemisphere, pyramid, nanowire, multi-level, bionic skin micro-nano structure; Simulation curve of the relationship between pressure and resistance based on the above microstructure[9]
Fig. 2 Schematic diagrams of pressure sensors based on different working mechanisms: (a) piezoelectric; (b) piezoresistive; (c) capacitive; (d) triboelectric[13]
Fig. 3 The relationship between the sensitivity of the flexible pressure sensor and the pressure range in literature
Fig. 4 Different applications of flexible pressure sensor in different pressure ranges: (a) sound monitoring[29]; (b) response to tiny weight (≈1 Pa)[30]; (c) human pulse monitoring[31]; (d) touch press response[32]; (e) robotic hand grabbing pressure testing[33]; (f) smart insoles[34]; (g) smart aircraft seats[35]; (h) flight pressure monitoring[36]; (i) car tire pressure monitoring[37]
Fig. 5 Schematic diagram of the sensitivity enhancement mechanism of the capacitive flexible pressure sensor with porous dielectric layer. The change of the electrodes distance and dielectric constant under pressure of sensor (a) without and (b) with the porous dielectric layer; (c) Comparison of the capacitance change between porous and solid dielectric sensor under pressure
Fig. 6 Stress distribution of the microstructured ionic gel dielectric under force[42]
Fig. 7 (a) The evolution of the distribution of conductive particles and its formed paths in the functional layer of flexible sensor under pressure; (b) The evolution of the contact points of conductive fibers under pressure[54]; (c) The analysis of the contact area between the microstructure and the electrode as well as its corresponding stress condition under pressure for the primary structure and (d) the multi-level structure
Fig. 8 Schematic diagram of the polarization of piezoelectric flexible pressure sensor (a) without and (b) with microstructures under pressure
Fig.9 Preparation of the microstructure conformal electrode of reduced graphene oxide using photolithography template method[60]
Fig. 10 (a) Preparation process of microstructured electrodes based on sandpaper template; (b) Raman spectra of conformal deposition of graphene on the surface of microstructures; (c~e) SEM of microstructures[65]
Fig. 11 Process of obtaining the porous microstructure inside the electrode by dissolving white sugar[71]
Fig. 12 SEM and schematic diagram of aerogel sensor[74]
Fig. 13 (a) Process of 3D printing for the active layer and (b) its corresponding process of flexible pressure sensor fabrication[83]; (c) Preparation of the microstructured functional layer by the 3D ink direct writing method in our group and rheological properties of the ink
Fig. 14 (a) The pressure sensitive composite ink based on PDMS, thermal expansion microcapsules and low-dimensional nanomaterials; (b) The porous microstructure formed by thermally expansion microcapsules in PDMS[85]; (c) The sensitivity characteristic curve of the flexible pressure sensor[85]; (d) response time[85]; (e) cyclically stability under 100 kPa[85]; (f) crank arm test[85]; (g) pressure distribution test[85]
Table 1 Comparison of different fabrication methods for the microstructures
Fabrication methods Easy-to-fabrication low-cost Mass production Microstructure controllability Production efficient
Lithography template + + +++ +++ ++
Natural template ++ +++ + + +
Sacrificial template ++ ++ ++ ++ ++
Vacuum freeze-drying ++ ++ ++ ++ +
3D printing ++ ++ ++ ++ ++
Print +++ +++ +++ ++ +++
Fig.15 Repair mechanism diagram based on multiple hydrogen bond self-repair[88]
Fig.16 Capacitive flexible pressure sensor based on MXene and PVDF-TrFE composite dielectric layer[96]:(a) Preparation process; (b) Interaction of MXene and PVDF-TrFE
Fig. 17 the hemisphere structure coated with (PEDOT:PSS)/ PUD solution and sensitivity curve[27]
Fig.18 Schematic diagram of the flexible pressure sensor based on electric double-layer ion gel[14]
Fig. 19 Typical applications of flexible pressure sensors with microstructures (a) human vocalization monitoring[92]; (b) pulse monitoring[31]; (c) elbow bending monitoring[85]; (d) smart insole[101]; (e) water simulation experiment diagram of sensors used on kayaks[102]; (f) flight pressure monitoring[36]; (g) robotic hand grabbing tennis balls[33]; (h) electronic skin used in robotic hands[103]; (i) electronic skin keyboard[95]; (j) diagram of microstructured sensors
Fig. 20 Applications of the flexible pressure sensor on human health and exercise monitoring[85,104]
Fig. 21 (a) The sensor network can be used on the surface of the human arm and the abdominal skin; (b) the optical image of the electronic skin; (c) the SEM image of the serpentine structure of the sensor array; (d) the composition of the sensor; (e) the sensor is highly stretchable for use in fingers and other skin[103]
Fig. 22 Human-machine interaction interface composed of flexible sensors and soft machines and its practical application[108]
Fig. 23 (a) Photographs of instant controlling of robot hand by demonstrating the gestures from “five” to “one”[109];(b) the diagram of the integrated robot hand, grasping process and its pressure response curve[110]
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