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Progress in Chemistry 2019, Vol. 31 Issue (6): 800-810 DOI: 10.7536/PC181039 Previous Articles   Next Articles

Fabrication and Application of Flexible Pressure Sensors with Micro/Nano-Structures

Yaoxu Xiong1,2, Yougen Hu1,**(), Pengli Zhu1,**(), Rong Sun1, Ching-Ping Wong3   

  1. 1.Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen 518055, China
    2.Shenzhen College of Advanced Technology, University of Chinese Academy of Sciences, Shenzhen 518055, China
    3.Georgia Institute of Technology, Georgia 30332, USA
  • Received: Online: Published:
  • Contact: Yougen Hu, Pengli Zhu
  • About author:
    ** E-mail: (Yougen Hu);
    (Pengli Zhu)
  • Supported by:
    National Natural Science Foundation of China(61701488); National Natural Science Foundation of China(21571186); Shenzhen Basic Research Plan(JCYJ20170818162548196); National and Local Joint Engineering Laboratory(2017-934); SIAT Innovation Program for Excellent Young Researchers(2016005)
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As one of flexible electronic devices, flexible pressure sensors have many merits such as high sensitivity, excellent flexibility and facile fabrication process, and they have been widely used in many burgeoning fields including wearable devices, health care, soft robots, human-machine interaction, etc. Sensitivity, detection limit, response time and cyclic stability are the key parameters of the flexible pressure sensors, and the introduction of micro/nano- structures into flexible pressure sensors will play an important role in improving their comprehensive performance. Based on the main types of micro-nano structure, this review introduces the latest research progress of flexible pressure sensors, including the influence of various morphological micro-nano structures on the performance of flexible pressure sensors and their applications in flexible electronics. Moreover, the prospect of their future development is also outlined.

Key words: flexible electronics, flexible pressure sensors, micro/nano-structure, piezoresistive, capacitive
Table 1 Comparison of resistive and capacitive flexible pressure sensors
Type Working principle Main functional materials Advantages Disadvantages
Resistive
sensor		 Bulk resistance change Piezoresistive material and conductive polymer composite Facile design and preparation,
low cost, easily detectable
signals and good frequency
response		 Hysteresis, unsatisfactory consistency, and nonlinearity
Contact resistance change Flexible polymer materials with microstructure conductive layer on surface High sensitivity, high spatial
resolution, less prone to
temperature and easily
detectable signals		 Surface microstructure needs to be formed in advance and resilience may degrade over time
Capacitive sensor Capacity change Conductor/dielectrics/conductor, where dielectrics may improve sensitivity of the hallow structure Fast response, high accuracy,
high precision, good resolution
and low hysteresis		 Electromagnetic interference, complicated detection circuit, nonlinear output, low load capacity and easily affected by parasitic capacitance
Fig. 1 Schematic diagram of the effect of micro/nano structure on piezoresistive and capacitive sensors (a) Piezoresistive flexible pressure sensor without micro/nano-structure; (b) Piezoresistive flexible pressure sensor with micro/nano-structure; (c) Capacitive flexible pressure sensor without micro/nano-structure; (d) Capacitive flexible pressure sensor without micro/nano-structure
Fig. 2 Process of the capacitive-type flexible pressure sensors with wavy microstructure by pre-stretching method:(a) Treating the pre-stretched PDMS by plasma;(b) Spin-coating silver nanowires;(c) Release of pre-stress;(d) Spin-coating PDMS(e) Separating PDMS;(f) Schematic diagram of assembled flexible pressure sensor[39]
Fig. 3 Schematic diagram and performance characterization of piezoresistive pressure sensor(a) Fabrication process;(b) Schematic diagram of microstructure changed during stretching;(c) Pressure detection;(d) Pulse detection[44]
Fig. 4 Preparation of micro-convex structure by self-assembly method[20]
Fig. 5 Schematic diagram of flexible pressure sensor and pulse signal monitoring diagram(a) Schematic diagram of sensor detecting human neck pulse;(b, c) The SEM of microstructure;(d) Schematic diagram of the monitoring human neck;(e) Pulse signal detection[48]
Fig. 6 Preparation of bionic microstructure(a) Fabrication process of imitation rosette micro-structure[64];(b) Fabrication process of imitation lotus leaf micro-structure[67];(c) Fabrication process of imitation epipremnumaureum leaf micro-structure[71]
Fig. 7 Pressure-sensing models of as-prepared RGO-PU-HT-P sponge pressure sensors and the contact area variation of fiber network with compressive deformation[76]
Fig. 8 Microstructure characterization and application of flexible pressure sensor(a) Schematic diagram of hollow sphere structure;(b) SEM and TEM morphology of hollow sphere;(c) Application of flexible pressure sensor in detecting pressure and its distribution[87]
Fig. 9 Pressure sensor with multi-size microstructure(a) Schematic diagram of pyramid microstructures of different sizes;(b) SEM;(c) Schematic diagram of deformation of different size microstructures under pressure and comparison[30]
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