English
往期目录
新闻公告
More
化学进展 2009, Vol. 21 Issue (12): 2734-2743 前一篇   后一篇

• 综述与评论 •

WO3基气敏传感器*

徐宇兴1,2**;谭强强1;唐子龙2;张中太2;袁章福1   

  1. (1. 中国科学院过程工程研究所   北京 100190；2. 清华大学材料科学与工程系 北京 100084)
  • 收稿日期:2008-11-21 修回日期:2009-02-06 出版日期:2009-12-24 发布日期:2009-12-01
  • 通讯作者: 徐宇兴 E-mail:yxxu@home.ipe.ac.cn
  • 基金资助:

    973项目;国家自然科学基金

下载PDF ( 2194 ) 引用
导出

WO3-Based Gas Sensors

Xu Yuxing1,2**;  Tan Qiangqiang1;  Tang Zilong2;  Zhang Zhongtai2;  Yuan Zhangfu1   

  1. (1. Institute of Process Engineering, Chinese Academy of Sciences, Beijing 100190, China; 2.Department of Materials Science and Engineering, Tsinghua University, Beijing 100084, China)
  • Received:2008-11-21 Revised:2009-02-06 Online:2009-12-24 Published:2009-12-01
  • Contact: Xu Yuxing E-mail:yxxu@home.ipe.ac.cn

气敏传感器已在生物、化学、航空、军事等领域获得了广泛的应用。鉴于WO3基气敏传感器是检测H2S、NOx、O3和NH3等气体最有前景的新型氧化物气敏传感器之一，本文以不同的敏感气体为分类依据系统阐述了近年来WO3基气敏传感器的研究进展，详细探讨了制备方法及贵金属掺杂对上述各种气体气敏性能的影响，并指出了目前WO3基气敏传感器在研究过程中存在的问题。

关键词： WO3, 气敏传感器, 气敏性能, 气敏机理

Gas sensors have been extensively developed in biology, chemistry, aeronautics, military affairs. WO3-based gas sensors have been characterized as one of the most promising neotype oxide gas sensors for the detection of H2S, NOx, O3, NH3 and so on. An overview clarified by different sensing gases of the progress in WO3-based gas sensors has been presented systematically. EEffects of preparation methods and noble metal dopants on gas sensing properties mentioned above have been discussed in detail. Gas sensing mechanism of WO3 gas sensor has been discussed in this paper. Finally, the problems existed during the research process of WO3-based gas sensors have been pointed out.

Contents
1 Introduction
2 Research progress
2.1 H2S gas sensors based on WO3
2.2 NOx gas sensors based on WO3
2.3 NH3 gas sensors based on WO3
2.4 H2 and CO gas sensors based on WO3
2.5 O3 gas sensors based on WO3
2.6 Other gas sensors based on WO3
2.7 Study of WO3 gas sensors on various gases simultaneously
3 Gas sensing mechanism of WO3 gas sensor
4 Conclusion

Key words: WO3, gas sensors, gas sensing properties, gas sensing mechanism

中图分类号: 

()

[ 1 ] 　Shaver P J . Appl . Phys. Lett . , 1967 , 11 (8) : 255 —230
[ 2 ] 　Barret E P S , Georgiades G C , Sermon P A. Sens. Actuators B ,1990 , 1 : 116 —122
[ 3 ] 　Dwyer D J . Sens. Actuators B , 1991 , 5 : 155 —161
[ 4 ] 　Smith D J , Vatelino J F , Flaconer R S , et al . Sens. Actuators B ,1993 , 13P14 : 264 —270
[ 5 ] 　Ruokamo I , K?rkk?inen T, Huusko J , et al . Lantto , 1994 , 19 (1/2/3) : 486 —488
[ 6 ] 　Fruhberger B , Grunze M, Dwyer D J . Sens. Actuators B , 1996 ,31 : 167 —174
[ 7 ] 　Lin H M, Hsu C M, Yang H Y, et al . Sens. Actuators B , 1994 ,22 : 63 —68
[ 8 ] 　Royster T L , Chatterjee D , Paz-Pujalt G R , et al . Sens. Actuators B , 1998 , 53 : 155 —162
[ 9 ] 　Solis J L , Hoel A , Kish L B , et al . J . Am. Ceram. Soc. , 2001 ,84 : 1504 —1508
[10 ] 　Antonik M D , Schneider J E , Wittman E L , et al . Thin Solid Films ,1995 , 256 : 247 —252
[11 ] 　Solis J L , Saukko S , Granqvist C G, et al . Thin Solid Films , 2001 ,391 : 255 —260
[12 ] 　Ionescu R , Hoel A , Granqvist C G, et al . Sens. Actuators B ,2005 , 104 : 132 —139
[13 ] 　Stankova M, Vilanova X, Calderer J , et al . Sens. Actuators B ,2004 , 102 : 219 —225
[14 ] 　Stankova M, Vilanova X, Calderer J , et al . Sens. Actuators B ,2006 , 113 : 241 —248
[15 ] 　Solis J L , Saukko S , Kish L B , et al . Sens. Actuators B , 2001 , 1/2 (15) : 316 —321
[16 ] 　Tao W H , Tsai C H. Sens. Actuators B , 2002 , 81 (2P3) 237 —247
[17 ] 　Ionescu R , Hoel A , Granqvist C G, et al . Sens. Actuators B ,2005 , 104 : 124 —131
[18 ] 　Jimenez J , Arbiol J , Dezanneau G, et al . Sens. Actuators B , 2003 ,93 : 475 —485
[19 ] 　Reyes L F , Hoel A , Saukko S , et al . Sens. Actuators B , 2006 ,117 : 128 —134
[20 ] 　Geng L N , Huang X L , Zhao Y Q , et al . Solid-State Electronics ,2006 , 50 : 723 —726
[21 ] 　Ponzoni A , Comini E , Sberveglieri G, et al . Appl . Phys. Lett . ,2006 , 88 : art . no. 203101
[22 ] 　Rout C S , Hegde M, Rao C N R. Sens. Actuators B , 2008 , 128 :488 —493
[23 ] 　Akiyama M, Tamaki J , Miura N , et al . Chem. Lett . , 1991 , 9 : 1611 —1616
[24 ] 　Satake K, Kobayashi A , Inoue T, et al . Proceedings of the 3rd International Meetting , Chem Sensors , Cleveland , USA , 1991. 334 —337
[25 ] 　Sadaoka Y, Sakai Y, Yamazoe N , et al . Denki Kagaku , 1982 , 50 : 457 —462
[26 ] 　Jones T A , Bott B. Sens. Actuators B , 1986 , 9 : 27 —37
[27 ] 　Nieuwenhuizen M S , Nederlof A J . Sens. Actuators B , 1989 , 19 : 385 —392
[28 ] 　Miura N , Sheng Y, Shimizu Y, et al . Sens. Actuators B , 1993 , 13/14 : 387 —390
[29 ] 　Nomura T, Murayama H , Amamoto T, et al . Pmt . Symposium Chem. Sensors Ⅱ, Hawai , USA , 1993. 530 —537
[30 ] 　Smith D J , Vetelino J F , Falconer R S , et al . Sens. Actuators B , 1993 , 13 : 264 —268
[31 ] 　Tamaki J , Fujii T, Fujimori K, et al . Proceedings of the Fifth International Meetting on Chemical Sensors , 1994. 498 —501
[32 ] 　Akiyama M, Zhang Z, Tamaki J , et al . Sens. Actuators B , 1993 , 13/14 : 619 —620
[33 ] 　Cantalini C , Passacantando M. Sens. Actuators B , 1996 , 31 : 81 — 87
[34 ] 　Inoue T, Ohtsuka K, Yoshiya Y, et al . Sens. Actuators B , 1995 , 25 (1/2/3) : 388 —391
[35 ] 　Sberveglieri G, Depero L , Groppelli S , et al . Sens. Actuators B , 1995 , 26 (1/2/3) : 89 —92
[36 ] 　Nelli P , Depero L E , Ferroni M, et al . Sens. Actuators B , 1996 , 31 : 89 —92
[37 ] 　Penza M, Vasanelli L. Sens. Actuators B , 1997 , 41 : 31 —36
[38 ] 　Penza M, Tagliente M A , Mirenghi L , et al . Sens. Actuators B , 1998 , 50 : 9 —18
[39 ] 　Penza M, Martucci C , Cassano G. Sens. Actuators B , 1998 , 1 (50) : 52 —59
[40 ] 　Kim T l of Korean Ceramic Society , 1997 , 34 : 387 —393
[41 ] 　Tomchenko A A , Khatko V V , Emelianov I L. Sens. Actuators B , 1998 , 46 : 8 —14
[42 ] 　Lee D S , Han S D. Sens. Actuators B , 1999 , 60 : 57 —63
[43 ] 　Chung Y K, Kim M H , Um W S , et al . Sens. Actuators B , 1999 , 60 : 49 —56
[44 ] 　Yang J I , Lim H , Han S D. Sens. Actuators B , 1999 , 60 : 71 —77
[45 ] 　Tomchenko A A , Emelianov I L , Khatko V V. Sens. Actuators B , 1999 , 57 : 166 —170
[46 ] 　Kim T S , Kim Y B , Yoo K S , et al . Sens. Actuators B , 2000 , 62 : 102 —108
[47 ] 　Lee D S , LimJ W, Lee S M, et al . Sens. Actuators B , 2000 , 64 : 31 —36
[48 ] 　Lee D S , Nam K H , Lee D D. Thin Solid Films , 2000 , 375 : 142 —146
[49 ] 　Lee D S , Han S D , Lee S M, et al . Sens. Actuators B , 2000 , 65 : 331 —335
[50 ] 　Zhao Y, Feng Z C , Liang Y. Sens. Actuators B , 2000 , 66 : 171 — 173
[51 ] 　Tong M, Dai G R , Wu Y D , et al . Journal of Materials Science , 2001 , 36 : 2535 —2538
[52 ] 　Starke T K H , Coles G S V , Ferkel H. Sens. Actuators B , 2002 , 85 : 239 —245
[53 ] 　Choi Y, Sakai G, Shimanoe K, et al . Sens. Actuators B , 2003 , 95 : 258 —265
[54 ] 　Wang S H , Choua T C , Liu C C. Sens. Actuators B , 2003 , 94 : 343 —351
[55 ] 　He X L , Li J P , Gao X G, et al . Sens. Actuators B , 2003 , 93 : 463 —467
[56 ] 　Teoh L G, Hona Y M, Shieh J , et al . Sens. Actuators B , 2003 , 96 : 219 —225
[57 ] 　Choi Y G, Sakai G, Shimanoe K, et al . Sens. Actuators B , 2004 , 101 : 107 —111
[58 ] 　Guidi V , Blo M, Butturi M A , et al . Sens. Actuators B , 2004 , 100 : 277 —282
[59 ] 　Kawasaki H , Ueda T, Suda Y, et al . Sens. Actuators B , 2004 , 100 : 266 —269
[60 ] 　Blo M, Carotta M C , Galliera S , et al . Sens. Actuators B , 2004 , 103 : 213 —218
[61 ] 　Tamaki J , Miyaji A , Makinodan J , et al . Sens. Actuators B , 2005 , 108 : 202 —206
[62 ] 　Rout C S , Ganesh K, Govindaraj A , et al . Applied Physics A , 2006 , 85 : 241 —246
[63 ] 　Polleux J , Gurlo A , Barsan N , et al . Angewandte Chemie — International Edition , 2006 , 45 : 261 —265
[64 ] 　Jin C J , Yamazakia T, Shiraia Y, et al . Thin Solid Films , 2005 , 474 : 255 —260
[65 ] 　Xie G Z, Yu J S , Chen X, et al . Sens. Actuators B , 2007 , 123 : 909 —914
[66 ] 　Liu Z F , Yamazaki T, Shen Y B , et al . Sens. Actuators B , 2007 , 128 : 173 —178
[67 ] 　Rossinyol E , Prim A , Pellicer E , et al . Advanced Functional Materials , 2007 , 17 : 1801 —1806
[68 ] 　Piperno S , Passacantando M, Santucci S , et al . Journal of Applied Physics , 2007 , 101 : art . no. 124504
[69 ] 　Maekawa T, Tamaki J , Miura N , et al . Chem. Lett . , 1992 : 639 — 642
[70 ] 　Wang X, Miura N , Yamazoe N. Sens. Actuators B , 2000 , 66 : 74 —76
[71 ] 　Xu C N , Miura N , Ishida Y, et al . Sens. Actuators B , 2000 , 65 : 163 —165
[72 ] 　Llobet E , Molas G, Molinàs P , et al . Journal of the Electrochemical Society , 2000 , 147 (2) : 776 —779
[73 ] 　Marquis B T, Vetelino J F. Sens. Actuators B , 2001 , 77 : 100 —110
[74 ] 　JimUnez I , Centeno M A , Scotti R , et al . Journal of the Electrochemical Society , 2003 , 150 (4) : H72 —H80
[75 ] 　JimUnez I , Centeno M A , Scotti R , et al . Journal of Materials Chemistry , 2004 , 14 : 2412 —2420
[76 ] 　Stankova M, Vilanova X, Llobet E , et al . Sens. Actuators B , 2005 , 105 : 271 —277
[77 ] 　Wang G, Ji Y, Huang X R , et al . Journal of Physics Chemistry B , 2006 , 110 : 23777 —23782
[78 ] 　Morazzoni F , Scotti R , Origoni L , et al . Catalysis Today , 2007 , 126 : 169 —176
[79 ] 　Srivastava V , Jain K. Sens. Actuators B , 2008 , 133 : 46 —52
[80 ] 　Balà zsi C , Wang L , Zayimc E O , et al . J . Eur. Ceram. Soc. , 2008 , 28 : 913 —917
[81 ] 　Triantafyllopoulou R , Illa X, Casals O , et al . Microelectronic Engineering , 2008 , 85 : 1116 —1119
[82 ] 　Svensson J S E M, Granqvist C G. Appl . Phys. Lett . , 1984 , 45 (8) : 828 —830
[83 ] 　Goldner R B , Norton P , Wong K, et al . Appl . Phys. Lett . , 1985 , 47 (5) : 536 —538
[84 ] 　Ito K, Ohgami T. Appl . Phys. Lett . , 1992 , 60 (8) : 938 —940
[85 ] 　Lee KH , Fang Y K, Lee WJ , et al . Sens. Actuators B , 2000 , 69 : 96 —99
[86 ] 　Davazoglou D , Dritas T. Sens. Actuators B , 2001 , 77 : 359 —362
[87 ] 　D’Amico A , Palma A , Verona E. Proceedings of the IEEE Ultrasonics Symposium , 1982 , 308 —311
[88 ] 　D’Amico A , Palma A , Verona E. Sens. Actuators B , 1982 , 3 : 31 —39
[89 ] 　Jakubik W P , Urbànczyk M W, Kochowski S , et al . Sens. Actuators B , 2002 , 82 : 265 —271
[90 ] 　Thiele J A , Cunha M P. Proceedings of the IEEE Ultrasonics Symposium , 2003 , 1750 —1753
[91 ] 　Ippolito S J , Kandasamy S , Kalantar-Zadeh K, et al . Smart Materials and Structures , 2006 , 15 : S131 —S136
[92 ] 　Ippolitoa S J , Kandasamya S , Kalantar-Zadeha K, et al . Sens. Actuators B , 2005 , 108 : 553 —557
[93 ] 　Ippolitoa S J , Kandasamya S , Kalantar-Zadeha K, et al . Sensor Letters , 2003 , 1 : 33 —36
[94 ] 　Ippolitoa S J , Kandasamya S , Kalantar-Zadeha K, et al . Proceedings SPIE , 2004 , 5274 : 416 —426
[95 ] 　Ippolitoa S J , Kandasamya S , Kalantar-Zadeha K, et al . Sens. Actuators B , 2005 , 108 : 154 —158
[96 ] 　Sedek A Z, Wlodarski W, Shin K, et al . Synthetic Metals , 2008 , 158 (1/2) : 29 —32
[97 ] 　Okazaki S , Nakagawa H , Asakura S , et al . Sens. Actuators B , 2003 , 93 : 142 —147
[98 ] 　Yamazoe N , Kurokawa Y, Seiyama T. Sens. Actuators B , 1983 , 4 : 283 —289
[99 ] 　Vlachos D S , Papadopoulos C A , Avaritsiotis J N. Sens. Actuators B , 1997 , 44 (1/2/3) : 458 —461
[100 ] Ando M, Chabicovsky R , Haruta M. Sens. Actuators B , 2001 , 76 : 13 —17
[101 ] Azad A M, Hammoud M. Sens. Actuators B , 2006 , 119 : 384 —391
[102 ] Kandasamy S , Trinchi A , Wlodarski W, et al . Sens. Actuators B , 2005 , 111/112 : 111 —116
[103 ] Nakagomi S , Okuda K, Kokubun Y. Sens. Actuators B , 2003 , 96 : 364 —371
[104 ] Xu Y X, Tang Z L , Zhang Z T, et al . Sens. Letters , 2008 , 6 (6) : 938 —941
[105 ] Lee D S , Han S D , Huh J S , et al . Sens. Actuators B , 1999 , 60 : 57 —63
[106 ] Cantalini C , Wlodarski W, Li Y, et al . Sensors Actuators B , 2000 , 64 : 182 —188
[107 ] Aliwell S R , Halsall J F , Pratt K F E , et al . Measurement Science and Technology , 2001 , 12 : 684 —690
[108 ] Aguir K, Lemire C , Lollman D B B. Sensors Actuators B , 2002 , 84 : 1 —5
[109 ] Fryˇcek R , VladimVr M, Martin V , et al . Sens. Actuators B , 2004 , 98 : 233 —238
[110 ] BendahanM, Boulmani R , Seguin J L , et al . Sens. Actuators B , 2004 , 100 : 320 —324
[111 ] Guérin J . Sens. Actuators B , 2005 , 104 : 289 —293
[112 ] Labidi A , Gillet E , Delamare R , et al . Sens. Actuators B , 2006 , 120 : 338 —345
[113 ] GuUrin J , Aguir K, Bendahan M. Sens. Actuators B , 2006 , 119 : 327 —334
[114 ] Boulmani R , Bendahan M, Lambert-Mauriat C , et al . Sens. Actuators B , 2007 , 125 : 622 —627
[115 ] Vallejos S , Khatko V , Aguir K, et al . Sens. Actuators B , 2007 ,126 : 573 —578
[116 ] Belkacem W, Labidi A , GuUrin J , et al . Sens. Actuators B , 2008 ,  132 : 196 —201
[117 ] Parvatikar N , Jain S , Khasima S , et al . Sens. Actuators B , 2006 , 114 : 599 —603
[118 ] Sriyudthsak M, Supothina S. Sens. Actuators B , 2006 , 113 : 265 — 271
[119 ] Shimizu Y, Matsunaga N , Hyodo T, et al . Sens. Actuators B , 2001 , 77 : 35 —40
[120 ] Labidi A , Lambert-Mauriat C , Jacolin C , et al . Sens. Actuators B , 2006 , 119 : 374 —379
[121 ] Khadayate R S , Waghulder R B , Wankhedem M G, et al . Bull . Mater. Sci . , 2007 , 30 (2) : 129 —133
[122 ] Ashraf S , Binions R , Blackman C S , et al . Polyhedron , 2007 , 26 : 1493 —1498
[123 ] Kanda K, Maekawa T. Sens. Actuators B , 2005 , 108 : 97 —101
[124 ] Luo S , Fub G, Chen H , et al . Mater. Chem. Phys. , 2008 , 109 : 541 —546
[125 ] Luo S , Fu G, Chen H , et al . Solid-State Electronics , 2007 , 51 : 913 —919
[126 ] Khadayate R S , Sali J V , Patil P P. Talanta , 2007 , 72 : 1077 — 1081
[127 ] Kanan S M, Waghe A , Jensen B L , et al . Talanta , 2007 , 72 : 401 —407
[128 ] Chaudhari G N , Bende A M, Bodade A B , et al . Talanta , 2006 , 69 : 187 —191
[129 ] Tomchenko A A , Harmer G P , Marquis B T, et al . Sens. Actuators B , 2003 , 93 : 126 —134
[130 ] Li X L , Lou T J , Sun X M, et al . Inorganic Chemistry , 2004 , 43 (17) : 5442 —5449
[131 ] Hoel A , Reyes L F , Heszler P , et al . Current Applied Physics , 2004 , 4 : 547 —553
[132 ] Hubálek J , Malysz K, Práˇsek J , et al . Sens. Actuators B , 2004 , 101 : 277 —283
[133 ] Khatko V , Llobet E , Vilanova X, et al . Sens. Actuators B , 2005 , 111P112 : 45 —51
[134 ] Ponzoni A , Comini E , Ferroni M, et al . Thin Solid Films , 2005 , 490 : 81 —85
[135 ] Khatko V , Calderer J , Llobet E , et al . Sens. Actuators B , 2005 , 109 : 128 —134
[136 ] Reyes L F , Hoel A , Saukko S , et al . Sens. Actuators B , 2006 , 117 : 128 —134
[137 ] Stankova M, Vilanova X, Llobet E , et al . Thin Solid Films , 2006 , 500 : 302 —308
[138 ] Stankova M, Vilanova X, Calderer J , et al . Sens. Actuators B , 2006 , 113 : 241 —248
[139 ] Bittencourt C , Felten A , Espinosa E H , et al . Sens. Actuators B , 2006 , 115 : 33 —41
[140 ] Khatko V , Vallejos S , Calderer J , et al . Sens. Actuators B , 2007 , 126 : 400 —405
[141 ] Comini E , Pandolfi L , Kaciulis S , et al . Sens. Actuators B , 2007 , 127 : 22 —28
[142 ] Vallejos S , Khatko V , Calderer J , et al . Sens. Actuators B , 2008 , 132 : 209 —215
[143 ] Ruiz A , Sakai G, Cornet A , et al . Sensors and Actuators B , 2003 , 93 : 509 —518
[1] 朱继秀, 陈巧芬, 倪梯铜, 陈爱民, 邬建敏. 气敏新材料MXenes在呼出气体传感器中的应用[J]. 化学进展, 2021, 33(2): 232-242.
[2] 朱继秀, 陈巧芬, 倪梯铜, 陈爱民, 邬建敏. 气敏新材料MXenes在呼出气体传感器中的应用[J]. 化学进展, 2021, 33(2): 232-242.
[3] 朱蕾, 王嘉楠, 刘建伟, 王玲, 延卫. 静电纺丝一维纳米材料在气敏传感器的应用[J]. 化学进展, 2020, 32(2/3): 344-360.
[4] 丁进月,钟良,张淑媛,马志. 溶胶-凝胶法制备纳米WO3气致变色材料* [J]. 化学进展, 2009, 21(6): 1171-1178.
阅读次数
全文


摘要

WO3基气敏传感器*